Theme / Area: Technologies. Single ion technology, Technologies. Quantum technology and nanodevices, Technologies. Instrumentation

Design of a 2-stage Acceleration Lens for a 100 keV Single-ion Implantation System

Yasuyuki Ishii, Yosuke Yuri, Nobumasa Miyawaki, Shinobu Onoda, Kazumaza Narumi, Yuichi Saitoh